PRODUCTS
New Challenge Technology
PARTS
Seal link
High temperature, high vacuum rotation/linear S-Seal unit for semiconductor equipment
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Problem solving : no lubrication method > Deposition equipment, CMP
- No lubricant, No risk of explosion
- No lubricant, No product contamination
- No lubricant supply, No rick of explotion
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What is sealing device?
Device to prevent fluid from leaking into the gap between the rotating shaft and the housing crack in the chemical reactor
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Problem solving : no lubrication method > Deposition equipment, CMP
Semiconductor: Intel(US)
Petrochemical : HYOSUNG, LG Chem
| Condition | Mechanical Seal | S-Seal(Seal Link) | Advantages |
|---|---|---|---|
| Driving method | Use of lubricant | No lubrication method | Product innovation |
| Lubricant supply device | Necessary | Unnecessary | Economics |
| loT technology | None | Real-time leak detection system | ICT convergence |
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Existing competitive products : Research on surface contact field
- Seal link : Research on line contact field
| Condition | Mechanical Seal | S-Seal(Seal Link) | Advantages |
|---|---|---|---|
| Driving method | Use of Ferrofluid | Non-lubricating method | Product innovation |
| Cooling system(100℃) | Necessary | Unnecessary | Economics |
| loT technology | None | Real-time leak detection system | ICT convergence |
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Existing competitive products : Research on magnetic fluid field
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Seal link : Research on line contact field
| product Specification | Mechanical seal | Magnetic fluid seal | S-Seal |
|---|---|---|---|
| structure |  |
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| Driving method | lubricant | Magnetic fluid | None-lubricant |
| Industrial field | Petrochemical | Semiconductor | Petrochemical+ Semiconductor |
| Conditions of use | pressure | vacuum | Pressure + vacuum |
| Price competition | High cost | High cost | 13% ↓ |
Price competitiveness 13%: Lubricant supply device 10% + Modularizatuib structure 3%
PV
- The first GFCs that were introduced were the GFC200, with a range of accuracy from 1 to 200 sccm, and the GFC2000 with range of accuracy from 10 to 2000 sccm.
- Samsung requested a lower flow GFC that would have a range of accuracy that extended to 0.1 sccm. The GFC20 was introduced to meet this need. Only the internal volume and the diameter of the valves were changed.
- Samsung then requested a GFC with a range of accuracy that extends to 0.025 sccm. We have introduced the GFC5, and once again, only the internal volume and the valve diameter needed to change.
MI
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Vibrationseverity
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SystemArchitecture
VibrationSensor
AcquisitionBoard
MCU Smart VBR
| Transducer Technical Features | ||
|---|---|---|
| He(5N) | 50BT/M | 47L Mn-Steel, JISS 22R |
| L-N2, N2(5N) | 3,000BT/M | 47L Mn-Steel, JISS 22R |
| L-Ar, Ar(5N) | 7,000BT/M | 47L Mn-Steel, JISS 22R |
| CO2 (5N) | 1,200BT/M | 47L Mn-Steel, JISS 22R |
| H2 (5N) | 3,600BT/M | 47L Mn-Steel, JISS 22R |
| O2 (5N) | 1,800BT/M | 47L Mn-Steel, JISS 22R |
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Functionalities
- Vibration Sensors sampling and acquisition;
- Signal elaboration and vibration severitiy computation;
- Datat ransmission and local representation of results throught multicolor LEDs.
| Acquisition Board technical features | |
|---|---|
| Supply voltage | 24V dc |
| Microcontroller | STM32F103ZET6 |
| Communication Port/Protocol | RS485/Modbus-RTU |
| Analog input(max) | 10 |
| Analog input sampling | 20kHz 24/16bit(ADC ext/u C |
| Power consumption(considcing 10inputs) | ≒1W |
| Storage temperature | -40°C - +85°C |
| Operating temperature | -40°C - +85°C |
| Climatic conditions | Indoor |
| Box materal | polymer |
| Box external size | 108 X 42 X 150 mm |
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Functionalities
- Data acquisition form n Acquisition Bords through MODBUS RTU on RS-485 port;
- Parameters setting (10816-3 severity threshold) on Acquisition Boards;
- Visualization on integrated WEB server interface;
- Very user friendly graphica linterface;
- Instantaneus data reading through web browser or additional TCP client for medium/long term monitoring, trend analysis, statistics, preventive and predictive maintenance, report, SCADA, etc...
| MCU Smart VBR technical features | |
|---|---|
| Supply voltage | 15-24V dc |
| Microcontroller | PIC18F97J60 |
| Communication Port/Protocol | Ethernet IEEE 802.3 10Base T RJ-45/Modbus-PTU |
| LCD Display | Optional |
| WEB Server | Integrated |
| Size | 2DIN modules |