GAS

FRD

  • Heating exhaust system

  • Mixture system

  • Charging Station-Ar, Hz, N2, CO2, O2, Etc

  • Xe/Kr Purification system

Semiconductor gas
Main Products CAPA Package
He(5N) 50BT/M 47L Mn-Steel, JISS 22R
L-N2, N2(5N) 3,000BT/M 47L Mn-Steel, JISS 22R
L-Ar, Ar(5N) 7,000BT/M 47L Mn-Steel, JISS 22R
CO2 (5N) 1,200BT/M 47L Mn-Steel, JISS 22R
H2 (5N) 3,600BT/M 47L Mn-Steel, JISS 22R
O2 (5N) 1,800BT/M 47L Mn-Steel, JISS 22R
Precursor
Category Item
Semi 3DMAS, TDMAT, TiCl4, TEOS, BDEAS, DIPAS
Display/LED TMG, TEG, TMA, TrisDMAS, BDEAS, DIPAS, BTBAS, BEMAS
Solar Cu, TEI
In Stock
Product Purity Product Purity
NF3 5N Cl2 5N5
C4F6 4N TCS 3N5
Si2H6 5N C2F6 5N
NH3 7N BCl3 5N
SF6 5N CH3F 4N
CF4 5N AsH3 6N
SF6 5N H2S 3N, 4N
SiH4 5N PH3 6N
GeH4 5N HCl 5N5