PARTS
Seal link
半导体装备用高温、高真空旋转/线形S-Seal unit
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解决问题：无润滑方式>蒸镀装备、CMP
- 无润滑油，不存在爆炸危险性
- 无润滑油，不存在产品污染
- 无润滑油供应装置，不存在爆炸危险性
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何谓密封装置？
密封装置旨在防止流体从化学反应器中旋转的轴和零部件保护罩夹缝中泄漏
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解决问题：无润滑方式>蒸镀装备、CMP
半导体: Intel(美国)
石油化学: HYOSUNG, LG Chem
| 条件 | Mechanical Seal | S-Seal(Seal link) | 优势 |
|---|---|---|---|
| 驱动方式 | 使用润滑油 | 无润滑方式 | 产品创新 |
| 润滑油供应装置 | 需要 | 不需要 | 经济性 |
| loT技术 | 无 | 实时泄漏感知系统 | ICT融合 |
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现有竞争产品：面接触领域研究
- Sealink：线接触领域研究
| 条件 | Mechanical Seal | S-Seal(Seal link) | 优势 |
|---|---|---|---|
| 驱动方式 | Ferrofluid 使用 | 无润滑方式 | 产品创新 |
| 冷却装置(100) | 需要 | 不需要 | 经济性 |
| loT技术 | 无 | 实时泄漏感知系统 | ICT融合 |
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现有竞争产品 : 磁流体领域研究
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Sealink：线接触领域研究
| 产品名称 | 机械密封 | 磁流体密封 | S-Seal |
|---|---|---|---|
| 结构 |  |
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| 运转方式 | 润滑油 | 磁流体 | 无润滑 |
| 产业领域 | 石油化学 | 半导体 | 化学+ 半导体 |
| 使用条件 | 压力 | 真空 | 压力+ 真空 |
| 价格竞争 | 高额费用 | 高额费用 | 减少13% |
价格竞争力 13% : 润滑油供应装置 10% + 模块化结构 3%
PV
- The first GFCs that were introduced were the GFC200, with a range of accuracy from 1 to 200 sccm, and the GFC2000 with range of accuracy from 10 to 2000 sccm.
- Samsung requested a lower flow GFC that would have a range of accuracy that extended to 0.1 sccm. The GFC20 was introduced to meet this need. Only the internal volume and the diameter of the valves were changed.
- Samsung then requested a GFC with a range of accuracy that extends to 0.025 sccm. We have introduced the GFC5, and once again, only the internal volume and the valve diameter needed to change.
MI
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Vibrationseverity
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SystemArchitecture
VibrationSensor
AcquisitionBoard
MCU Smart VBR
| Transducer Technical Features | ||
|---|---|---|
| He(5N) | 50BT/M | 47L Mn-Steel, JISS 22R |
| L-N2, N2(5N) | 3,000BT/M | 47L Mn-Steel, JISS 22R |
| L-Ar, Ar(5N) | 7,000BT/M | 47L Mn-Steel, JISS 22R |
| CO2 (5N) | 1,200BT/M | 47L Mn-Steel, JISS 22R |
| H2 (5N) | 3,600BT/M | 47L Mn-Steel, JISS 22R |
| O2 (5N) | 1,800BT/M | 47L Mn-Steel, JISS 22R |
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Functionalities
- Vibration Sensors sampling and acquisition;
- Signal elaboration and vibration severitiy computation;
- Datat ransmission and local representation of results throught multicolor LEDs.
| Acquisition Board technical features | |
|---|---|
| Supply voltage | 24V dc |
| Microcontroller | STM32F103ZET6 |
| Communication Port/Protocol | RS485/Modbus-RTU |
| Analog input(max) | 10 |
| Analog input sampling | 20kHz 24/16bit(ADC ext/u C |
| Power consumption(considcing 10inputs) | ≒1W |
| Storage temperature | -40°C - +85°C |
| Operating temperature | -40°C - +85°C |
| Climatic conditions | Indoor |
| Box materal | polymer |
| Box external size | 108 X 42 X 150 mm |
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Functionalities
- Data acquisition form n Acquisition Bords through MODBUS RTU on RS-485 port;
- Parameters setting (10816-3 severity threshold) on Acquisition Boards;
- Visualization on integrated WEB server interface;
- Very user friendly graphica linterface;
- Instantaneus data reading through web browser or additional TCP client for medium/long term monitoring, trend analysis, statistics, preventive and predictive maintenance, report, SCADA, etc...
| MCU Smart VBR technical features | |
|---|---|
| Supply voltage | 15-24V dc |
| Microcontroller | PIC18F97J60 |
| Communication Port/Protocol | Ethernet IEEE 802.3 10Base T RJ-45/Modbus-PTU |
| LCD Display | Optional |
| WEB Server | Integrated |
| Size | 2DIN modules |