반도체

PV

Strong History of Continuous Innovation
Extendibility to Lower Flow Rates

- The first GFCs that were introduced were the GFC200, with a range of accuracy from 1 to 200 sccm, and the GFC2000 with range of accuracy from 10 to 2000 sccm.


- Samsung requested a lower flow GFC that would have a range of accuracy that extended to 0.1 sccm. The GFC20 was introduced to meet this need. Only the internal volume and the diameter of the valves were changed.


- Samsung then requested a GFC with a range of accuracy that extends to 0.025 sccm. We have introduced the GFC5, and once again, only the internal volume and the valve diameter needed to change.

MI

Standard ISO 10816-3
Mechanical vibration-Evaluation of machine vibration by measurements on non-rotating parts-Part3: Industrial machines with nominal power above 15 kW and nominal speeds between 120 r/min and 15000 r/min when neasured insitu
  • Vibrationseverity

  • SystemArchitecture

    VibrationSensor
    AcquisitionBoard
    MCU Smart VBR

Extendibility to Lower Flow Rates
VibrationSensor
Transducer Technical Features
He(5N) 50BT/M 47L Mn-Steel, JISS 22R
L-N2, N2(5N) 3,000BT/M 47L Mn-Steel, JISS 22R
L-Ar, Ar(5N) 7,000BT/M 47L Mn-Steel, JISS 22R
CO2 (5N) 1,200BT/M 47L Mn-Steel, JISS 22R
H2 (5N) 3,600BT/M 47L Mn-Steel, JISS 22R
O2 (5N) 1,800BT/M 47L Mn-Steel, JISS 22R
Acquisition Board
  • Functionalities

    - Vibration Sensors sampling and acquisition;

    - Signal elaboration and vibration severitiy computation;

    - Datat ransmission and local representation of results throught multicolor LEDs.

Acquisition Board technical features
Supply voltage 24V dc
Microcontroller STM32F103ZET6
Communication Port/Protocol RS485/Modbus-RTU
Analog input(max) 10
Analog input sampling 20kHz 24/16bit(ADC ext/u C
Power consumption(considcing 10inputs) ≒1W
Storage temperature -40°C - +85°C
Operating temperature -40°C - +85°C
Climatic conditions Indoor
Box materal polymer
Box external size 108 X 42 X 150 mm
MCU Smart VBR
  • Functionalities

    - Data acquisition form n Acquisition Bords through MODBUS RTU on RS-485 port;

    - Parameters setting (10816-3 severity threshold) on Acquisition Boards;

    - Visualization on integrated WEB server interface;

    - Very user friendly graphica linterface;

    - Instantaneus data reading through web browser or additional TCP client for medium/long term monitoring, trend analysis, statistics, preventive and predictive maintenance, report, SCADA, etc...

MCU Smart VBR technical features
Supply voltage 15-24V dc
Microcontroller PIC18F97J60
Communication Port/Protocol Ethernet IEEE 802.3 10Base T RJ-45/Modbus-PTU
LCD Display Optional
WEB Server Integrated
Size 2DIN modules